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Dynamic Behavior of Liquid Microlenses Actuated Using Dielectric Force
Yang, Chih-Cheng, Tsai, Chih-Wei Gary, Yeh, J. AndrewVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2162493
Date:
October, 2011
File:
PDF, 1.11 MB
english, 2011