Interfacial-Layer-Driven Dielectric Degradation and...

IEEE Electron Device Letters 2011 / 10 Vol. 32; Iss. 10

Interfacial-Layer-Driven Dielectric Degradation and Breakdown of HfSiON/SiON Gate Dielectric nMOSFETs

Choi, Do-Young, Lee, Kyong Taek, Baek, Chang-Ki, Sohn, Chang Woo, Sagong, Hyun Chul, Jung, Eui-Young, Lee, Jeong-Soo, Jeong, Yoon-Ha
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Volume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2011.2161861
Date:
October, 2011
File:
PDF, 454 KB
english, 2011
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