Power Output Force Generation by a MEMS Phase Change...

Journal of Microelectromechanical Systems 2011 / 12 Vol. 20; Iss. 6

Power Output Force Generation by a MEMS Phase Change Actuator

Weiss, Leland W., Richards, Cill D., Richards, Robert F.
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2167660
Date:
December, 2011
File:
PDF, 740 KB
english, 2011
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