![](/img/cover-not-exists.png)
Power Output Force Generation by a MEMS Phase Change Actuator
Weiss, Leland W., Richards, Cill D., Richards, Robert F.Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2167660
Date:
December, 2011
File:
PDF, 740 KB
english, 2011