Recent progress in sputtering PZT thin films for...

Integrated Ferroelectrics 1998 / 09 Vol. 21; Iss. 1-4

Recent progress in sputtering PZT thin films for ferroelectric memories

Sakoda, Tomoyuki, Aoki, Katsuhiro, Hashimoto, Satoshi, Fukuda, Yukio
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Volume:
21
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808202079
Date:
September, 1998
File:
PDF, 570 KB
english, 1998
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