High Temperature Oxidation of TiAlN Thin Films for Memory...

High Temperature Oxidation of TiAlN Thin Films for Memory Devices

Park, Sang-Shik, Yoon, Soon-Gil
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Volume:
48
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/713718323
Date:
January, 2002
File:
PDF, 726 KB
english, 2002
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