Deposition Uniformity, Particle Nucleation, and the Optimum Conditions for Chemical Vapor Deposition in Multiwafer Furnaces
Griffiths, Stewart K.Volume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837602
File:
PDF, 1.76 MB
english, 1997