Deposition Uniformity, Particle Nucleation, and the Optimum...

Deposition Uniformity, Particle Nucleation, and the Optimum Conditions for Chemical Vapor Deposition in Multiwafer Furnaces

Griffiths, Stewart K.
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Volume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837602
File:
PDF, 1.76 MB
english, 1997
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