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[Taiwan Semicond. Ind. Assoc 2002 Semiconductor Manufacturing Technology Workshop - Hsinchu, China (10-11 Dec. 2002)] Semiconductor Manufacturing Technology Workshop, 2002 - Study of photo resist-free process for shallow trench isolation etch on advance VLSI technology
Chia-Tzong Tso,, Mei-Ho Ko,, Chuan-Chieh Huang,, So-Wen Kuo,Year:
2002
Language:
english
DOI:
10.1109/smtw.2002.1197397
File:
PDF, 302 KB
english, 2002