Active Opening Force and Passive Contact Force...

Journal of Microelectromechanical Systems 2006 / 10 Vol. 15; Iss. 5

Active Opening Force and Passive Contact Force Electrostatic Switches for Soft Metal Contact Materials

Oberhammer, J., Stemme, G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.882810
Date:
October, 2006
File:
PDF, 1.27 MB
english, 2006
Conversion to is in progress
Conversion to is failed