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[IEEE 2013 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2013.12.9-2013.12.11)] 2013 IEEE International Electron Devices Meeting - Film profile engineering (FPE): A new concept for manufacturing of short-channel metal oxide TFTs
Lyu, Rong-Jhe, Lin, Horng-Chih, Wu, Ming-Hung, Shie, Bo-Shiuan, Hung, Hsiang-Ting, Huang, Tiao-YuanYear:
2013
Language:
english
DOI:
10.1109/iedm.2013.6724607
File:
PDF, 997 KB
english, 2013