A simple bidirectional linear microactuator for...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2006 / 06 Vol. 53; Iss. 6

A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

Friend, J., Gouda, Y., Nakamura, K., Ueha, S.
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Volume:
53
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2006.1642514
Date:
June, 2006
File:
PDF, 856 KB
english, 2006
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