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[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (19-22 May 1997)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Measurement and control of RF power in inductively coupled plasma
Alexandrovich, B.M., Godyak, V.A., Pejak, R.B.Year:
1997
Language:
english
DOI:
10.1109/plasma.1997.605214
File:
PDF, 98 KB
english, 1997