[IEEE 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192) - Baltimore, MD, USA (7-12 June 1998)] 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192) - DC-to-mm-wave absolute potential measurements inside digital microwave ICs using a micromachined photoconductive sampling probe

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