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The relation between microstructure and hydrogen content and evolution for hydrogenated amorphous silicon films prepared by magnetron sputtering
Das, S. R., Charbonneau, S., Williams, D. F., Webb, J. B., MacDonald, J. R., Polk, D. R., Zukotynski, S., Perz, J.Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-138
Date:
June, 1985
File:
PDF, 409 KB
english, 1985