Experimental Study of Breakdown Time in a Pulsed 2.45-GHz...

IEEE Transactions on Plasma Science 2012 / 12 Vol. 40; Iss. 12

Experimental Study of Breakdown Time in a Pulsed 2.45-GHz ECR Hydrogen Plasma Reactor

Cortazar, O. Daniel, Megia-Macias, Ana, Vizcaino-de-Julian, Alvaro
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Volume:
40
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2012.2222933
Date:
December, 2012
File:
PDF, 1.32 MB
english, 2012
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