[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - A novel fabrication process for ultra-sharp, high-aspect ratio nano tips using (111) single crystalline silicon

Jaehong Park,, Kidong Park,, Byoungdoo Choi,, Kyo-In Koo,, Seung-Joon Paik,, Sangjun Park,, Jongpal Kim,, Dong-Il Dan Cho,

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1216972

File:

PDF, 238 KB

english, 2003

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