Nanostructures Fabrication on Ta Thin Film Using Atomic Force Microscope Lithography
Lee, Sunwoo, Lee, Haiwon, Lee, Do Haing, Park, Byung-Jae, Yeom, Geun YoungVolume:
445
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/15421400500369484
Date:
March, 2006
File:
PDF, 235 KB
english, 2006