High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

Journal of Microelectromechanical Systems 2013 / 10 Vol. 22; Iss. 5

High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

Tabrizian, Roozbeh, Hodjat-Shamami, Mojtaba, Ayazi, Farrokh
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2273031
Date:
October, 2013
File:
PDF, 571 KB
english, 2013
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