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[IEEE 2006 7th International Conference on Electronic Packaging Technology - Shanghai, China (2006.08.26-2006.08.29)] 2006 7th International Conference on Electronic Packaging Technology - Hermeticity Investigation of MEMS Vacuum Packaging
Lin, Dong, Gan, Zhiyin, Wang, Xuefang, Wang, Chenggang, Zhang, Honghai, Liu, ShengYear:
2006
Language:
english
DOI:
10.1109/icept.2006.359660
File:
PDF, 3.24 MB
english, 2006