Integrated micro-electro-mechanical sensor development for...

IEEE Aerospace and Electronic Systems Magazine 1998 / Nov. Vol. 13; Iss. 11

Integrated micro-electro-mechanical sensor development for inertial applications

Allen, J.J., Kinney, R.D., Sarsfield, J., Daily, M.R., Ellis, J.R., Smith, J.H., Montague, S., Howe, R.T., Boser, B.E., Horowitz, R., Pisano, A.P., Lemkin, M.A., Clark, W.A., Juneau, T.
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Volume:
13
Language:
english
Journal:
IEEE Aerospace and Electronic Systems Magazine
DOI:
10.1109/62.730622
Date:
January, 1998
File:
PDF, 540 KB
english, 1998
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