[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - An MSI Micromechanical Differential Disk-Array Filter
Li, Sheng-Shian, Lin, Yu-Wei, Ren, Zeying, Nguyen, Clark T.-C.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300130
File:
PDF, 2.59 MB
english, 2007