Influence of sputtering power on the structural and morphological properties of semiconducting Mg2Si films
Qingquan Xiao, Quan Xie, Zhiqiang Yu, Kejie ZhaoVolume:
11
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.phpro.2011.01.021
File:
PDF, 620 KB
english, 2011