![](/img/cover-not-exists.png)
Epitaxy of Pb(Zr, Ti)O3films on Ir/YSZ/Si under conditions of cathode sputtering: The effect of reactive gas composition
V. G. Beshenkov,A. A. Burlakov,A. G. Znamenskii…Volume:
40
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785014080045
Date:
August, 2014
File:
PDF, 473 KB
english, 2014