Epitaxy of Pb(Zr, Ti)O3films on Ir/YSZ/Si under conditions...

Epitaxy of Pb(Zr, Ti)O3films on Ir/YSZ/Si under conditions of cathode sputtering: The effect of reactive gas composition

V. G. Beshenkov,A. A. Burlakov,A. G. Znamenskii…
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Volume:
40
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785014080045
Date:
August, 2014
File:
PDF, 473 KB
english, 2014
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