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Residual stress and structural characteristics in Ti and Cu sputtered films on glass substrates at different substrate temperatures and film thickness
Hadi Savaloni, Ali Taherizadeh, Akbar ZendehnamVolume:
349
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.physb.2004.01.158
File:
PDF, 348 KB
english, 2004