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Performances of a-Si:H films using hot wire assisted microwave ECR CVD technique
Ying Li, Guanghua Chen, Shengyi Yin, Qing Wang, Xuemei SongVolume:
357
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2004.12.006
File:
PDF, 234 KB
english, 2005