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Enhancement of oxygen precipitation in Czochralski silicon wafers by high-temperature anneals
Ling Zhong, Xiangyang Ma, Daxi Tian, Deren YangVolume:
376-377
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2005.12.045
File:
PDF, 450 KB
english, 2006