Enhanced elasticity in parylene thin films by copolymerization approach
Francesco Galeotti,Anita Andicsova,Fabio Bertini…Volume:
49
Language:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-014-8462-2
Date:
November, 2014
File:
PDF, 1.73 MB
english, 2014