An attempt to specify thermal history in CZ silicon wafers and possibilities for its modification
G. Kissinger, A. Sattler, T. Müller, W. von AmmonVolume:
401-402
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2007.08.128
File:
PDF, 151 KB
english, 2007