Passivation and reactivation of carriers in B- and P-doped...

Physica B: Condensed Matter 2007 Vol. 401-402; Iss. none

Passivation and reactivation of carriers in B- and P-doped Si treated with atomic hydrogen

N. Fukata, S. Sato, S. Fukuda, K. Ishioka, M. Kitajima, S. Hishita, K. Murakami
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Volume:
401-402
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2007.08.140
File:
PDF, 265 KB
english, 2007
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