Quantitative analysis of complexes in electron irradiated...

Physica B: Condensed Matter 2007 Vol. 401-402; Iss. none

Quantitative analysis of complexes in electron irradiated CZ silicon

N. Inoue, H. Ohyama, Y. Goto, T. Sugiyama
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Volume:
401-402
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.physb.2007.09.003
File:
PDF, 473 KB
english, 2007
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