Defect studies for the development of nano-scale silicon diffusion simulators
Masashi Uematsu, Yasuo Shimizu, K.M. ItohVolume:
401-402
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.physb.2007.09.011
File:
PDF, 370 KB
english, 2007