Laser-induced melting and recrystallization of CVD grown polycrystalline Si/SiGe/Ge layers
P.I. Gaiduk, S.L. Prakopyeu, V.A. Zajkov, G.D. Ivlev, E.I. GatskevichVolume:
404
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2009.08.127
File:
PDF, 409 KB
english, 2009