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Dislocation luminescence and electrical properties of dislocation network produced by silicon direct wafer bonding
Anton Bondarenko, Oleg Vyvenko, Nikolay Bazlov, Oleg KononchukVolume:
404
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2009.08.143
File:
PDF, 332 KB
english, 2009