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Effect of nanocrystalline phase on the electrical conductivity of amorphous tantalum-containing silicon-carbon films
A. D. Barinov,L. V. Kutuzov,A. I. Popov,M. Yu. PresnyakovVolume:
50
Language:
english
Journal:
Inorganic Materials
DOI:
10.1134/S0020168514090015
Date:
September, 2014
File:
PDF, 953 KB
english, 2014