Theoretical and experimental studies on Cu metallization of...

Theoretical and experimental studies on Cu metallization of Al2O3

Robert V. Kasowski, Fumio S. Ohuchi, Roger H. French
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Volume:
150
Year:
1988
Language:
english
Pages:
3
DOI:
10.1016/0378-4363(88)90103-9
File:
PDF, 228 KB
english, 1988
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