Transition Metal Silicides—Low Resistivity Alternatives for...

JOM Journal of the Minerals, Metals and Materials Society 1984 / 07 Vol. 36; Iss. 7

Transition Metal Silicides—Low Resistivity Alternatives for Polysilicon and Metals in Integrated Circuits

Shyam P. Murarka
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Volume:
36
Language:
english
Journal:
JOM
DOI:
10.1007/BF03338505
Date:
July, 1984
File:
PDF, 636 KB
english, 1984
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