The influence of bombardment conditions upon the sputtering and secondary ion yields of silicon
A.E. Morgan, H.A.M. de Grefte, N. Warmoltz, H.W. Werner, H.J. TolleVolume:
7
Year:
1981
Language:
english
Pages:
21
DOI:
10.1016/0378-5963(81)90084-2
File:
PDF, 1.11 MB
english, 1981