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Electron energy loss and Auger electron spectroscopy of ultrathin oxide films on silicon obtained in rf oxygen plasma
E.D. Atanasova, A.V. ShopovVolume:
10
Year:
1982
Language:
english
Pages:
18
DOI:
10.1016/0378-5963(82)90148-9
File:
PDF, 601 KB
english, 1982