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Reduction of chromatic aberration influences in vertical scanning white-light interferometry
Lehmann, Peter, Kühnhold, Peter, Xie, WeichangVolume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/6/065203
Date:
June, 2014
File:
PDF, 1.48 MB
english, 2014