![](/img/cover-not-exists.png)
[IEEE 2010 IEEE 3rd International Nanoelectronics Conference (INEC 2010) - Hong Kong (2010.01.3-2010.01.8)] 2010 3rd International Nanoelectronics Conference (INEC) - Fabrication of Si/SiO2/Au nanoparticles/HfO2 MOS capacitor structure by spin coating method
Shih-Tang Chen,, Hua-Chiang Chen,, Kun-Cheng Huang,, Fu-Ken Liu,, Ching-Chich Leu,Year:
2010
DOI:
10.1109/INEC.2010.5424590
File:
PDF, 4.98 MB
2010