Comparison of electrical and reliability characteristics of...

IEEE Electron Device Letters 2002 / 07 Vol. 23; Iss. 7

Comparison of electrical and reliability characteristics of different 14 /spl Aring/ oxynitride gate dielectrics

Tung-Ming Pan,, Hsiu-Shan Lin,, Main-Gwo Chen,, Chuan-Hsi Liu,, Yih-Jau Chang,
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Volume:
23
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2002.1015223
Date:
July, 2002
File:
PDF, 215 KB
english, 2002
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