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[IEEE 2006 25th International Conference on Microelectronics - Belgrade, Serbia and Montenegro (14-17 May 2006)] 2006 25th International Conference on Microelectronics - Numerical Investigation of O2 Adsorption Effect in Si - CF4/O2 System
Grigoryev, Yu.N., Gorobchuk, A.G.Year:
2006
Language:
english
DOI:
10.1109/icmel.2006.1651012
File:
PDF, 177 KB
english, 2006