[IEEE IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (1990.06.4-1990.06.7)] IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Environmentally rugged, wide dynamic range microstructure airflow sensor
Ohnstein, T.R., Johnson, R.G., Higashi, R.E., Burns, D.W., Holmen, J.O., Satren, E.A., Johnson, G.M., Bicking, R.E., Johnson, S.D.Year:
1990
DOI:
10.1109/solsen.1990.109843
File:
PDF, 275 KB
1990