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Influence of Etching Potential on Convex Corner Anisotropic Etching in TMAH Solution
Bagolini, Alvise, Faes, Alessandro, Decarli, MassimilianoVolume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2067436
Date:
October, 2010
File:
PDF, 448 KB
english, 2010