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[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Analytical Modeling and Quantitative Analysis of Scratch Drive Actuator
Jean W. Zu,, Qiuzhen Qu,, Gong Cheng,Year:
2004
Language:
english
DOI:
10.1109/icmens.2004.1509027
File:
PDF, 172 KB
english, 2004