![](/img/cover-not-exists.png)
A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors
Mohammadi, Ali, Moheimani, S. O. Reza, Yuce, Mehmet RasitVolume:
35
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2014.2313291
Date:
May, 2014
File:
PDF, 1.95 MB
english, 2014