[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Design of HDP CVD ceramic liners for plasma sources
Wing Cheng,, Kudriavtsev, A., Kolobov, V.Year:
2003
Language:
english
DOI:
10.1109/plasma.2003.1228660
File:
PDF, 88 KB
english, 2003