Thermal oxidation of sputtered TiN diffusion barriers

Solar Cells 1981 Vol. 5; Iss. 1

Thermal oxidation of sputtered TiN diffusion barriers

Dag Sigurd, Ilkka Suni, Leszek Wieluński, Marc-A. Nicolet, Hermann von Seefeld
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Volume:
5
Year:
1981
Language:
english
Pages:
6
DOI:
10.1016/0379-6787(81)90018-1
File:
PDF, 300 KB
english, 1981
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