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[IEEE IEEE/SEMI International Symposium on Semiconductor Manufacturing Science - Burlingame, CA, USA (21-23 May 1990)] IEEE/SEMI International Symposium on Semiconductor Manufacturing Science - Knowledge extraction techniques for expert system assisted wafer screening
Khera, D., Cresswell, M.W., Linholm, L.W., Ramanathan, G., Buzzeo, J., Nagarajan, A.Year:
1990
Language:
english
DOI:
10.1109/ismss.1990.66127
File:
PDF, 527 KB
english, 1990