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Nanogrinding of Silicon Wafer Using a Novel Vitrified Diamond Wheel
Huo, Fengwei, Zhao, Honghao, Zhao, DongjieVolume:
26
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426914.2010.523916
Date:
August, 2011
File:
PDF, 995 KB
english, 2011