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[IEEE 2008 Third International Forum on Strategic Technologies (IFOST) - Novosibirsk, Russia (2008.06.23-2008.06.29)] 2008 Third International Forum on Strategic Technologies - Using the trajectory analysis for measuring nano-objects by the interference phase-shifting systems
Guzhov, Vladimir Ivanovich, Ilinykh, Sergey Petrovich, Ilyin, Maxim EduardovichYear:
2008
Language:
english
DOI:
10.1109/ifost.2008.4603022
File:
PDF, 304 KB
english, 2008